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Wafer-carrier Mounting Photomicrosensors





EE-SPY801 / 802





 





Photomicrosensors for detecting wafer-carrier mounting.





The mounting position is set with a pedestal.





The contact surface with the wafer carrier uses a special chemical-resistant fluororesin.





The unique optical system enables stable detection of almost all wafer-carriers.





Light modulation effectively reduces external light interference.





Utilizes talc-free clean cables

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Omron Wafer-carrier Mounting Photomicrosensors EE-- A&S Automation Co., Ltd

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